The following photograph shows facet flatness in digital mode by using ZYGO MARK IV. In process of measurement, He-Ne laser is applied to the mirror facet and interference fringe appears.
|
| Facet flatness represents a uniformity of mirror facet (surface). This is measured by interferometer applying laser beam on the facet. The following photograph shows facet flatness in digital mode by using ZYGO MARK IV. In process of measurement, He-Ne laser is applied to the mirror facet and interference fringe appears. |
 |
|
 |